| 序号 | 股票代码 | 股票简称 | 持股数量(股) | 持股市值(元) | 占基金净值比(%) |
| 1 | 603986 | 兆易创新 | 39,700.00 | 32,355,500.00 | 6.14 |
| 2 | 688256 | 寒武纪 | 19,614.00 | 31,295,117.70 | 5.93 |
| 3 | 688347 | 华虹宏力 | 88,975.00 | 29,922,292.50 | 5.67 |
| 4 | 688037 | 芯源微 | 66,555.00 | 29,220,972.75 | 5.54 |
| 5 | 688981 | 中芯国际 | 178,549.00 | 28,357,152.18 | 5.38 |
| 6 | 002371 | 北方华创 | 29,855.00 | 26,408,538.80 | 5.01 |
| 7 | 688766 | 普冉股份 | 33,407.00 | 25,609,806.20 | 4.86 |
| 8 | 688072 | 拓荆科技 | 28,386.00 | 24,966,338.58 | 4.73 |
| 9 | 688012 | 中微公司 | 50,318.00 | 23,573,983.00 | 4.47 |
| 10 | 688200 | 华峰测控 | 43,749.00 | 22,972,599.90 | 4.36 |