| 序号 | 股票代码 | 股票简称 | 持股数量(股) | 持股市值(元) | 占基金净值比(%) |
| 1 | 688825 | 长鑫科技 | 243,551.00 | 12,020,243.51 | 5.02 |
| 2 | 688981 | 中芯国际 | 105,177.00 | 11,778,772.23 | 4.92 |
| 3 | 688205 | 德科立 | 55,552.00 | 11,610,368.00 | 4.85 |
| 4 | 688012 | 中微公司 | 35,146.00 | 11,195,758.30 | 4.68 |
| 5 | 002371 | 北方华创 | 17,800.00 | 10,964,266.00 | 4.58 |
| 6 | 300502 | 新易盛 | 28,185.00 | 10,963,965.00 | 4.58 |
| 7 | 603228 | 景旺电子 | 104,700.00 | 10,596,687.00 | 4.43 |
| 8 | 300308 | 中际旭创 | 12,856.00 | 10,393,304.64 | 4.34 |
| 9 | 688678 | 福立旺 | 306,165.00 | 9,537,039.75 | 3.98 |
| 10 | 688630 | 芯碁微装 | 23,208.00 | 9,020,485.44 | 3.77 |