| 序号 | 股票代码 | 股票简称 | 持股数量(股) | 持股市值(元) | 占基金净值比(%) |
| 1 | 688200 | 华峰测控 | 28,101.00 | 10,509,774.00 | 9.73 |
| 2 | 688037 | 芯源微 | 32,102.00 | 10,506,021.54 | 9.73 |
| 3 | 688072 | 拓荆科技 | 16,122.00 | 10,318,080.00 | 9.55 |
| 4 | 300567 | 精测电子 | 54,700.00 | 10,066,441.00 | 9.32 |
| 5 | 300604 | 长川科技 | 39,500.00 | 9,471,705.00 | 8.77 |
| 6 | 688012 | 中微公司 | 28,790.00 | 9,171,054.50 | 8.49 |
| 7 | 002371 | 北方华创 | 14,700.00 | 9,054,759.00 | 8.38 |
| 8 | 01347 | 华虹宏力 | 99,000.00 | 8,957,269.33 | 8.29 |
| 9 | 688809 | 强一股份 | 15,480.00 | 7,564,147.20 | 7.00 |
| 10 | 688409 | 富创精密 | 44,285.00 | 7,532,878.50 | 6.98 |