| 序号 | 股票代码 | 股票简称 | 持股数量(股) | 持股市值(元) | 占基金净值比(%) |
| 1 | 688147 | 微导纳米 | 11,000.00 | 1,780,680.00 | 5.83 |
| 2 | 920438 | 戈碧迦 | 11,000.00 | 1,747,460.00 | 5.72 |
| 3 | 688037 | 芯源微 | 3,700.00 | 1,624,485.00 | 5.32 |
| 4 | 688630 | 芯碁微装 | 2,900.00 | 1,593,231.00 | 5.21 |
| 5 | 688257 | 新锐股份 | 15,600.00 | 1,589,640.00 | 5.20 |
| 6 | 301377 | 鼎泰高科 | 2,800.00 | 1,542,520.00 | 5.05 |
| 7 | 688120 | 华海清科 | 4,400.00 | 1,417,592.00 | 4.64 |
| 8 | 688082 | 盛美上海 | 3,100.00 | 1,339,200.00 | 4.38 |
| 9 | 688072 | 拓荆科技 | 1,500.00 | 1,319,295.00 | 4.32 |
| 10 | 688525 | 佰维存储 | 2,600.00 | 1,286,298.00 | 4.21 |