| 序号 | 股票代码 | 股票简称 | 持股数量(股) | 持股市值(元) | 占基金净值比(%) |
| 1 | 688766 | 普冉股份 | 6,876.00 | 5,271,141.60 | 4.13 |
| 2 | 688200 | 华峰测控 | 9,671.00 | 5,078,242.10 | 3.98 |
| 3 | 688037 | 芯源微 | 10,520.00 | 4,618,806.00 | 3.62 |
| 4 | 688627 | 精智达 | 5,682.00 | 4,062,630.00 | 3.18 |
| 5 | 688313 | 仕佳光子 | 21,464.00 | 3,963,327.60 | 3.10 |
| 6 | 688019 | 安集科技 | 11,455.00 | 3,888,514.30 | 3.04 |
| 7 | 688002 | 睿创微纳 | 21,640.00 | 3,347,491.60 | 2.62 |
| 8 | 688630 | 芯碁微装 | 5,663.00 | 3,111,195.57 | 2.44 |
| 9 | 688409 | 富创精密 | 9,879.00 | 3,025,443.75 | 2.37 |
| 10 | 688167 | 炬光科技 | 8,316.00 | 2,945,610.36 | 2.31 |