| 序号 | 股票代码 | 股票简称 | 持股数量(股) | 持股市值(元) | 占基金净值比(%) |
| 1 | 01347 | 华虹半导体 | 63,000.00 | 4,227,882.50 | 7.69 |
| 2 | 688361 | 中科飞测 | 26,959.00 | 4,124,457.41 | 7.50 |
| 3 | 688012 | 中微公司 | 13,478.00 | 3,675,720.16 | 6.68 |
| 4 | 688072 | 拓荆科技 | 10,616.00 | 3,503,280.00 | 6.37 |
| 5 | 002371 | 北方华创 | 7,500.00 | 3,443,100.00 | 6.26 |
| 6 | 688256 | 寒武纪 | 2,527.00 | 3,425,474.85 | 6.23 |
| 7 | 301611 | 珂玛科技 | 39,500.00 | 3,386,335.00 | 6.16 |
| 8 | 688019 | 安集科技 | 15,471.00 | 3,371,440.32 | 6.13 |
| 9 | 688037 | 芯源微 | 22,311.00 | 3,313,406.61 | 6.03 |
| 10 | 688981 | 中芯国际 | 26,430.00 | 3,246,396.90 | 5.90 |