| 序号 | 股票代码 | 股票简称 | 持股数量(股) | 持股市值(元) | 占基金净值比(%) |
| 1 | 688012 | 中微公司 | 136,979.00 | 64,174,661.50 | 14.19 |
| 2 | 002371 | 北方华创 | 68,415.00 | 60,517,172.40 | 13.38 |
| 3 | 688256 | 寒武纪 | 27,720.00 | 44,228,646.00 | 9.78 |
| 4 | 688041 | 海光信息 | 82,145.00 | 30,418,293.50 | 6.72 |
| 5 | 688072 | 拓荆科技 | 32,258.00 | 28,371,878.74 | 6.27 |
| 6 | 300604 | 长川科技 | 81,100.00 | 27,689,162.00 | 6.12 |
| 7 | 688120 | 华海清科 | 72,357.00 | 23,311,978.26 | 5.15 |
| 8 | 688361 | 中科飞测 | 44,799.00 | 19,263,570.00 | 4.26 |
| 9 | 688981 | 中芯国际 | 90,030.00 | 14,298,564.60 | 3.16 |
| 10 | 688200 | 华峰测控 | 25,646.00 | 13,466,714.60 | 2.98 |