| 序号 | 股票代码 | 股票简称 | 持股数量(股) | 持股市值(元) | 占基金净值比(%) |
| 1 | 688361 | 中科飞测 | 140,888.00 | 49,182,591.92 | 9.55 |
| 2 | 688037 | 芯源微 | 122,891.00 | 40,218,537.57 | 7.81 |
| 3 | 688256 | 寒武纪 | 34,502.00 | 34,812,863.02 | 6.76 |
| 4 | 688200 | 华峰测控 | 71,728.00 | 26,826,272.00 | 5.21 |
| 5 | 605111 | 新洁能 | 488,140.00 | 26,359,560.00 | 5.12 |
| 6 | 688012 | 中微公司 | 77,296.00 | 24,622,640.80 | 4.78 |
| 7 | 300604 | 长川科技 | 100,500.00 | 24,098,895.00 | 4.68 |
| 8 | 301611 | 珂玛科技 | 220,100.00 | 18,510,410.00 | 3.60 |
| 9 | 688041 | 海光信息 | 74,580.00 | 16,914,744.00 | 3.29 |
| 10 | 688825 | 长鑫科技 | 323,377.00 | 16,182,572.89 | 3.14 |