| 序号 | 股票代码 | 股票简称 | 持股数量(股) | 持股市值(元) | 占基金净值比(%) |
| 1 | 300502 | 新易盛 | 102,424.00 | 62,171,368.00 | 7.98 |
| 2 | 688256 | 寒武纪 | 37,177.00 | 59,317,762.35 | 7.61 |
| 3 | 605111 | 新洁能 | 542,240.00 | 53,757,673.60 | 6.90 |
| 4 | 300308 | 中际旭创 | 42,100.00 | 53,467,000.00 | 6.86 |
| 5 | 688361 | 中科飞测 | 118,543.00 | 50,973,490.00 | 6.54 |
| 6 | 002384 | 东山精密 | 186,800.00 | 49,006,980.00 | 6.29 |
| 7 | 688200 | 华峰测控 | 79,697.00 | 41,848,894.70 | 5.37 |
| 8 | 688012 | 中微公司 | 85,884.00 | 40,236,654.00 | 5.16 |
| 9 | 603986 | 兆易创新 | 41,000.00 | 33,415,000.00 | 4.29 |
| 10 | 688037 | 芯源微 | 75,060.00 | 32,955,093.00 | 4.23 |